Advanced Raman Microscopy for Wafer Analysis
RAMANdrive is a state-of-the-art Raman microscope specifically designed for wafer analysis, featuring a dedicated 300 mm stage. This system enables ultra-fast, high-resolution analysis across the entire wafer with exceptional stability and precision.
Precision 300 mm Wafer Stage
Capable of accommodating wafers up to 300 mm, the stage uses vacuum channels to securely hold and flatten the wafer, ensuring optimal conditions for analysis. The extended wafer stage allows full laser access to the entire exposed wafer surface, while the deep channel section enables the examination of even taller samples.
Effortless Data Upload with the Stage Navigation System
As an integral feature of the RAMANdrive software, the Stage Navigation System enhances workflow efficiency. Simply upload data from your standard inspection tool, and RAMANdrive will automatically locate and analyze the designated areas of interest. This functionality extends to other sample types as needed.
High-Performance Raman Imaging
Nanophoton’s proprietary technology delivers exceptional speed and resolution using a unique laser line illumination system. This innovative approach captures 400 spectra in a single laser shot, enabling the rapid collection of hundreds of thousands of data points within minutes. By scanning the laser line across the sample without moving it, RAMANdrive achieves high-speed Raman imaging with uncompromised accuracy and resolution.
Nanophoton’s advanced confocal optical system provides unparalleled spatial and spectral resolution in three dimensions. This high spatial resolution allows for the detection of particles as small as 100 nm, while precise spectral resolution and positioning accuracy enable detailed stress and polytype analysis.