Cryogenic silicon analysis system
The CryoSAS was developed as a dedicated all-in-one system for the low temperature impurity analysis and quality control of silicon crystals. Optimized for operation in the industrial environment, the CryoSAS combines a high performance Bruker FT-IR interferometer with a built-in, closed cycle cryo-cooling system that does not require any liquid nitrogen or liquid helium. CryoSAS operation is completely automated, and includes reporting of the analysis results according to SEMI and ASTM standards
Features:
- Quantification of group III and V shallow impurities (B, P, As, Al, Ga, Sb) in single crystal Si down to the low ppta range
- Quantification of substitutional carbon in polysilicon or single crystal Si down to the low ppba range
- Quantification of interstitial oxygen in polysilicon or single crystal Si down to the low ppba range
- Closed cycle cooling that requires no cryogenic liquids
- Fully automated measurement cycle and data evaluation, including report generation
